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NSE - 845 Nanolithography and Device Fabrication
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Campus
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SCME
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Programs
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PG
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Session
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Fall Semester 2016
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Course Title
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Nanolithography and Device Fabrication
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Course Code
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NSE - 845
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Credit Hours
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3
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Pre-Requisutes
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Course Objectives
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- This course will provide an understanding of the basic concepts in Nanoscience and Engineering.
- It will give an insight into nanofabrication: Principles, Capabilities and Limits which presents a one-stop decommention at the introductory level on most technologies that have been developed which are capable of making structures below 100nm.
- It will give basic understandings on the principles of each technology which is illustrated with minimum mathematics involved.
- It will also teach the capabilities of each technology in making sub-100nm structures.
- It will also demonstrate the analysis on the limits of preventing a technology from further going down the dimensional scale.
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Detail Content
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- Nanofabrication by Scanning Probes, Exposure of Resist by STM
- Exposure of Resist by NSOM, Local Oxidation Lithography
- Additive Nanofabrication, Field-Induced Deposition, Dip-Pen Nanolithography
- Subtractive Nanofabrication, Electrochemical Etching
- Field-induced Decomposition, Thermomechanical Indentation
- Mechanical Scratching, High-Throughput SPL
- Nanofabrication by Replication, Thermal Press Nanoimprint
- Nanoimprint Stamps, NanoimprintPolymers, Demolding, Alignment
- Room Temperature Nanoimprint, UV-Cured Nanoimprint
- Transparent Stamps, UV Curable Polymers
- Soft Lithography; Soft Stamps, Micro-contact Printing
- Replication by Capillary Force Nanoscale Pattern Transfer
- Additive Pattern Transfer; Thin Film Deposition, Pattern Transfer by Lift-Off
- RIE by Inductively Coupled Plasma Critical Issues in RIE
- Ion Milling Indirect Nanofabrication Sidewall Lithography
- Multistep Processing , Super Resolution Patterning
- Nanofabrication by Self-Assembly, Self-Assembly Processes
- Guided Self-Assembly, Building Blocks of Future Nanosystems
- DNA Scaffold, Carbon Nanotubes, Block Copolymers, Porous Alumina
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Text/Ref Books
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- Nanofabrication: Principles, Capabilities and Limits, Zheng Cui, Springer 2008, 343 pages.
- Bhushan, Editor. Handbook of Nanotechnology. Springer. 2004. Edition: First. Pages: 1220. ISBN: 3-540-01218-4.
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Time Schedule
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Fall Semester 2014
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Faculty/Resource Person
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Dr Muhammad
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