National University of Sciences and Technology
Home | Back
NSE - 845 Nanolithography and Device Fabrication
Campus SCME
Programs PG
Session Fall Semester 2016
Course Title Nanolithography and Device Fabrication
Course Code NSE - 845
Credit Hours 3
Course Objectives
  • This course will provide an understanding of the basic concepts in Nanoscience and Engineering.
  • It will give an insight into nanofabrication: Principles, Capabilities and Limits which presents a one-stop decommention at the introductory level on most technologies that have been developed which are capable of making structures below 100nm.
  • It will give basic understandings on the principles of each technology which is illustrated with minimum mathematics involved.
  • It will also teach the capabilities of each technology in making sub-100nm structures.
  • It will also demonstrate the analysis on the limits of preventing a technology from further going down the dimensional scale.
Detail Content
  • Nanofabrication by Scanning Probes, Exposure of Resist by STM
  • Exposure of Resist by NSOM, Local Oxidation Lithography
  • Additive Nanofabrication, Field-Induced Deposition, Dip-Pen Nanolithography
  • Subtractive Nanofabrication, Electrochemical Etching
  • Field-induced Decomposition, Thermomechanical Indentation
  • Mechanical Scratching, High-Throughput SPL
  • Nanofabrication by Replication, Thermal Press Nanoimprint
  • Nanoimprint Stamps, NanoimprintPolymers, Demolding, Alignment
  • Room Temperature Nanoimprint, UV-Cured Nanoimprint
  • Transparent Stamps, UV Curable Polymers
  • Soft Lithography; Soft Stamps, Micro-contact Printing
  • Replication by Capillary Force Nanoscale Pattern Transfer
  • Additive Pattern Transfer; Thin Film Deposition, Pattern Transfer by Lift-Off
  • RIE by Inductively Coupled Plasma Critical Issues in RIE
  • Ion Milling Indirect Nanofabrication Sidewall Lithography
  • Multistep Processing , Super Resolution Patterning
  • Nanofabrication by Self-Assembly, Self-Assembly Processes
  • Guided Self-Assembly, Building Blocks of Future Nanosystems
  • DNA Scaffold, Carbon Nanotubes, Block Copolymers, Porous Alumina
Text/Ref Books
  • Nanofabrication: Principles, Capabilities and Limits, Zheng Cui, Springer 2008, 343 pages.
  • Bhushan, Editor. Handbook of Nanotechnology. Springer. 2004. Edition: First. Pages: 1220. ISBN: 3-540-01218-4.
Time Schedule Fall Semester 2014
Faculty/Resource Person Dr Muhammad