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EE-876 Semiconductor Processing
Campus
College of E&ME
Programs
PG
Session
Fall Semester 2016
Course Title
Semiconductor Processing
Course Code
EE-876
Credit Hours
3-0
Pre-Requisutes
Nil
Course Objectives
The course is offered as graduate level subject. The main focus of the subject is on the semiconductor processes involved in fabrication of very large scale integrated circuits. Intially, the couse will attempt to study indivisual processes and towards end these processes areintegrated together into a process scheduled for the fabrication of CMOS and bipolar circuits. The course will enable students to have abroad grasp of the multidisciplinary nature of the semiconductor processtechnology and will provide the basics for students, who may enter the semiconductor industry, to build on.
Detail Content
Introduction to Semiconductor Processing
Optical Lithography
Next Generation Lithgraphy X-ray and E-bram
Modern CMOS Technology
Crystal Growth and Wafer Fabrication
Thin film Deposition-CVDProceses
Thin Film Deposition-DVD Processes
Thermal Oxidationand Si/SiO2 Interface
Dopant Diffusion
Ion Implation
Etching
Process Integration
Text/Ref Books
Silicon VLSI Technology, Fundamental, Practice ad Modellingby James D. Plummer
Time Schedule
Fall 2015
Faculty/Resource Person
Dr. Hamood-Ur-Rehman
PhD (Australia)
Discipline: Electrical Engineering
Specialization: MEMs, NEMs, Semiconductor Devices, Micro/Nano Fabrication