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EE-876 Semiconductor Processing
Campus College of E&ME
Programs PG
Session Fall Semester 2016
Course Title Semiconductor Processing
Course Code EE-876
Credit Hours 3-0
Pre-Requisutes Nil
Course Objectives The course is offered as graduate level subject. The main focus of the subject is on the semiconductor processes involved in fabrication of very large scale integrated circuits. Intially, the couse will attempt to study indivisual processes and towards end these processes areintegrated together into a process scheduled for the fabrication of CMOS and bipolar circuits. The course will enable students to have abroad grasp of the multidisciplinary nature of the semiconductor processtechnology and will provide the basics for students, who may enter the semiconductor industry, to build on.
Detail Content
  • Introduction to Semiconductor Processing
  • Optical Lithography
  • Next Generation Lithgraphy X-ray and E-bram
  • Modern CMOS Technology
  • Crystal Growth and Wafer Fabrication
  • Thin film Deposition-CVDProceses
  • Thin Film Deposition-DVD Processes
  • Thermal Oxidationand Si/SiO2 Interface
  • Dopant Diffusion
  • Ion Implation
  • Etching
  • Process Integration
Text/Ref Books Silicon VLSI Technology, Fundamental, Practice ad Modellingby James D. Plummer
Time Schedule Fall 2015
Faculty/Resource Person Dr. Hamood-Ur-Rehman
PhD (Australia)
Discipline: Electrical Engineering
Specialization: MEMs, NEMs, Semiconductor Devices, Micro/Nano Fabrication