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ME-851 Micro Electro Mechanical Systems
Campus
College of E&ME
Programs
PG
Session
Fall Semester 2016
Course Title
Micro Electro Mechanical Systems
Course Code
ME-851
Credit Hours
3-0
Pre-Requisutes
Basic understanding of Engineering Physics and Chemistry
Course Objectives
MEMS corresponds to the study and understanding of systems and devices at micro level. At this level design choices are limited not only by the challenges in fabrication but also by the proper grasp of dominant physical, chemical, and biological principles acting on the devices. This course deals with the fundamentals of Micro and nano electro mechanical systems (MEMS and NEMS). The course offers insight in MEMS design principles, detailed fabrication techniques, and detailed analysis of processes involved in MEMS system implementation. Discussion about micro sensors, micro actuators and their modeling techniques are also part of this course.
Detail Content
Introduction to microfabrication
Overview of microfabrication
Silicon based MEMS processes
New materials
Electrical and mechanical concepts
Semiconductor materials
Carrier density calculations
Conductivity and resistivity
Stress and strain
Intrinsic stresses
Resonant frequency and Q factor
Electrostatic sensing and actuation
Parallel plate capacitors and applications
Interdigitated finger capacitors
Comb drives
Thermal sensing and actuation
Thermal expansion
Thermal couples
Thermal resistors
Thermal sensors
Piezoresistive sensing
Sensor materials
Sensor mechanical analysis
Bulk micromachining
Dry / wet etching
DRIE
Gas-phase etchants
Anisotropic etching
Surface micromachining
Basic processes
Structural and sacrificial material
Stiction/anti stiction methods
Microfluidic applications
Basic concepts
Design of channels and valves
Optical MEMS
Lenses
Mirrors
Text/Ref Books
Foundation of MEMS by Chang Liu, Latest Ed, PEARSON, Prentice-Hall Inc (Text Book)
Fundamentals of microfabrication: The science of miniaturization by Marc J. Madou, Latest Ed. CRC Press (Reference Book)
Time Schedule
Fall 2015
Faculty/Resource Person
Dr Umer Izhar
PhD (Lehigh University), PA USA
Discipline: Electrical Engineering
Specialization: MEMS