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ME-851 Micro Electro Mechanical Systems
Campus College of E&ME
Programs PG
Session Fall Semester 2016
Course Title Micro Electro Mechanical Systems
Course Code ME-851
Credit Hours 3-0
Pre-Requisutes Basic understanding of Engineering Physics and Chemistry
Course Objectives MEMS corresponds to the study and understanding of systems and devices at micro level. At this level design choices are limited not only by the challenges in fabrication but also by the proper grasp of dominant physical, chemical, and biological principles acting on the devices. This course deals with the fundamentals of Micro and nano electro mechanical systems (MEMS and NEMS). The course offers insight in MEMS design principles, detailed fabrication techniques, and detailed analysis of processes involved in MEMS system implementation. Discussion about micro sensors, micro actuators and their modeling techniques are also part of this course.
Detail Content
  • Introduction to microfabrication
    • Overview of microfabrication
    • Silicon based MEMS processes
    • New materials
  • Electrical and mechanical concepts
    • Semiconductor materials
    • Carrier density calculations
    • Conductivity and resistivity
    • Stress and strain
    • Intrinsic stresses
    • Resonant frequency and Q factor
  • Electrostatic sensing and actuation
    • Parallel plate capacitors and applications
    • Interdigitated finger capacitors
    • Comb drives
  • Thermal sensing and actuation
    • Thermal expansion
    • Thermal couples
    • Thermal resistors
    • Thermal sensors
  • Piezoresistive sensing
    • Sensor materials
    • Sensor mechanical analysis
  • Bulk micromachining
    • Dry / wet etching
    • DRIE
    • Gas-phase etchants
  • Anisotropic etching
  • Surface micromachining
    • Basic processes
    • Structural and sacrificial material
    • Stiction/anti stiction methods
  • Microfluidic applications
    • Basic concepts
    • Design of channels and valves
  • Optical MEMS
    • Lenses
    • Mirrors
Text/Ref Books
  • Foundation of MEMS by Chang Liu, Latest Ed, PEARSON, Prentice-Hall Inc (Text Book)
  • Fundamentals of microfabrication: The science of miniaturization by Marc J. Madou, Latest Ed. CRC Press (Reference Book)
Time Schedule Fall 2015
Faculty/Resource Person Dr Umer Izhar
PhD (Lehigh University), PA USA
Discipline: Electrical Engineering
Specialization: MEMS