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ME-851 Micro Electro Mechanical Systems
Campus College of E&ME
Programs PG
Session Spring Semester 2017
Course Title Micro Electro Mechanical Systems
Course Code ME-851
Credit Hours 3-0
Pre-Requisutes None
Course Objectives
  • MEMS corresponds to the study and understanding of systems and devices at micro level.
  • At this level design choices are limited not only by the challenges in fabrication but also by the proper grasp of dominant physical, chemical, and biological principles acting on the devices.
  • This course deals with the fundamentals of Micro and nano electro mechanical systems (MEMS and NEMS).
  • The course offers insight in MEMS design principles, detailed fabrication techniques, and detailed analysis of processes involved in MEMS system implementation.
  • Discussion about micro sensors, micro actuators and their modeling techniques are also part of this course.
Detail Content
  • Introduction to microfabrication
    • Overview of microfabrication
    • Silicon based MEMS processes
    • New materials
  • Electrical and mechanical concepts
    • Semiconductor materials
    • Carrier density calculations
    • Conductivity and resistivity
    • Stress and strain
    • Intrinsic stresses
    • Resonant frequency and Q factor
  • Electrostatic sensing and actuation
    • Parallel plate capacitors and applications
    • Interdigitated finger capacitors
    • Comb drives
  • Thermal sensing and actuation
    • Thermal expansion
    • Thermal couples
    • Thermal resistors
    • Thermal sensors
  • Piezoresistive sensing
    • Sensor materials
    • Sensor mechanical analysis
  • Bulk micromachining
    • Dry / wet etching
    • DRIE
    • Gas-phase etchants
  • Anisotropic etching
  • Surface micromachining
    • Basic processes
    • Structural and sacrificial material
    • Stiction/anti stiction methods
  • Microfluidic applications
    • Basic concepts
    • Design of channels and valves
  • Optical MEMS
    • Lenses
    • Mirrors
Text/Ref Books
  • Foundation of MEMS by Chang Liu, Latest Ed, PEARSON, Prentice-Hall Inc (Text Book)
  • Fundamentals of microfabrication: The science of miniaturization by Marc J. Madou, Latest Ed. CRC Press (Reference Book)
Time Schedule Spring Semester 2017
Faculty/Resource Person Dr. Muhammad Mubasher Saleem
PhD (Mechatronics) 2015, Italy
Discipline: Mechatronics
Specialization: MEMs